Applications of Finite Element Methods for Reliability Studies on ULSI Interconnections 87 The ITRS short-and long-term targets

The ITRS short-and long-term targets indicate continued scaling improvements at about the current rate by 2016

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Applications of Finite Element Methods for Reliability Studies on ULSI Interconnections 87 The ITRS short-and long-term targetsApplications of Finite Element Methods for Reliability Studies on ULSI Interconnections provides a detailed description of the application of finite element methods (FEMs) to the study of ULSI interconnect reliability. Over the past two decades the application of FEMs has become widespread and continues to lead to a much better understanding of reliability physics. To help readers cope with the increasing sophistication of FEMs applications to